| 6
INCH GATE VALVE |
| |
Head
Gate |
205-369 |
| |
Bonnet
To Body |
205-266 |
| |
Actuator
Block To Bonnet |
205-228 |
| |
Access
Cover |
205-226 |
| |
Bellows
To Actualor Block |
205-225 |
| |
Bellows
To Rack Holder |
205-114 |
| |
Piston
To Bellows |
205-218 |
| |
Piston
To Cylinder |
205-239 |
| |
End
Cap To Cylinder |
205-240 |
| |
Throttle
Piston To Cylinder |
205-349 |
| |
Cylinder
To Piston |
205-141 |
| |
Shaft
Seal |
205-112 |
| |
Ion
Gauge Tube |
205-116 |
| 10"
AND L/L VALVES |
| |
Bonnet
to Body (10") |
205-277 |
| |
Bonnet
to Body (L/L) |
205-384 |
| |
Head
Gate |
205-454 |
| |
L/L
Gate |
205-457 |
| |
Actuator
Block To Bonnet |
205-235 |
| |
Access
Cover |
205-235 |
| |
Bellows
To Rack Holder / Throttle Shaft (10") |
205-212 |
| |
Bellows
To Actuator Block |
205-229 |
| |
Piston
To Bellows |
205-218 |
| |
Piston
To Cylinder |
205-435 |
| |
Cylinder
To Piston |
205-337 |
| |
End
Cap To Cylinder |
205-258 |
| |
Throttle
Piston To Throttle Air Cylinder (10") |
205-442 |
| |
Ion
Gauge Tube (10") |
205-116 |
| MECH.
PUMP BAFFLE |
| |
Top
Plate Seal |
205-243 |
| SUBSTRATE
HEATER WITHOUT IRCON (HOR1Z-STYLE) |
| |
Wate
Jacket To Door |
205-282 |
| |
Feedthru
To Door / Blank Off To Door |
205-216 |
| |
Blank
Off To Door |
205-247 |
| CATHODE
ASSEMBLY |
| |
Water
Jacket To Backing Plate |
205-282 |
| |
Backing
Plate To Insulator / Insulator To Door |
205-283 |
| |
Modified
Insulator, Insulator To Door |
205-387 |
| MAIN
AND END CHAMBER |
| |
Flange
To RGA Port / Rotary Feedthrus To Chamber |
159-002 |
| |
Rotary
Viewports To Chamber / Windows To Chamber |
205-245 |
| |
Rotary
Feedthru To Chamber |
205-026 |
| |
Gas
Feedthru To Chamber |
205-216 |
| |
Octal
Feedthru To Chamber |
205-216 |
| |
Pallet
Indexer Nut (Indexer Assembly) |
205-210 |
| |
Gate
Valve To Sub Plate To Spool To Chamber (10") |
205-454 |
| |
Gate
Valve To Sub Plate To Spool To Chamber (6") |
205-266 |
| |
Manifold
To Cryo Spools |
205-223 |
| |
Blank
Off Plate To Chamber Bottom / Transition To Chamber |
205-465 |
| |
Chamber
To Chamber |
205-469 |
| |
Door
To Main Chamber |
205-31 |
| |
End
Chamber Door To End Chamber |
205-30 |
| |
End
Chamber Window To End Chamber Door |
205-382 |
| |
Water
Jacket To End Chamber |
205-276 |
| |
R/L
End Chamber To Valve Housing |
205-389 |
| |
Right
Dutchman To Main Chamber |
|
| |
Valve
Housing To R/L Dutchman |
|
| |
Cryo
(CTI 8) To Gate Valve Housing (6") |
205-172 |
| |
Cryo
(CTI 10) To Gate Valve Housing (10") |
205-278 |
| SPUTTER
ETCH |
| |
Bottom
Plate To Chamber |
205-465 |
| |
Rotary
F/T, Rail Drive |
159-004 |
| |
Lifter
Bellows Assembly (2) |
205-210 |
| |
Electrode
Bellows (4) |
|
| |
Electrode
To Bellows (4) |
|
| |
Electrode
Mounting Flange To Door (4) |
|
| |
1"
F/T |
|
| |
Viewport
(Standoff) |
205-245 |
| |
Upper
Rail Lifter Plate |
205-347 |
| |
Sputter
Etch Igniter |
205-210 |
| |
|
|
| |
back
to top |
|
