| TRAP
/ VALVE / BAFFLE COMBO |
| |
Head
Gate |
205-369 |
| |
Bonnet
/ Body |
205-266 |
| |
TVBC
/ I.G. Tube |
205-116 |
| DIFFUSION
PUMP STACK |
| |
Diffusion
Pump to Trap Valve |
205-267 |
| |
Diffusion
Pump Foreline |
205-332 |
| |
Trap
Valve To Sub-Plate |
205-266 |
| |
Sub-Plate
to Spool Piece |
205-266 |
| |
Spool
Piece To Main Chamber |
205-266 |
| |
Roughing
Manifold To Trap Door |
205-223 |
| 6
INCH GATE VALVE |
| |
Head
Gate |
205-369 |
| |
Bonnet
To Body |
205-266 |
| |
Actuator
Block To Bonnet |
205-228 |
| |
Access
Cover |
205-226 |
| |
Bellows
To Actuators Block |
205-225 |
| |
Bellows
To Rack Holder |
205-114 |
| |
Pistons
To Bellows |
205-218 |
| |
Piston
To Cylinder |
205-239 |
| |
Cylender
To Piston |
205-141 |
| |
End
Cap To Cylinder |
205-240 |
| |
Throttle
Piston To Cylinder |
205-349 |
| |
Shaft
Seal |
205-112 |
| |
TVBC
To I.G. Tube |
205-116 |
| CT-8
CRYO KIT |
| |
Top
Flange |
205-172 |
| |
Poppet
Valve / Cryo |
205-116 |
| |
Poppet
Valve / Seat |
205-213 |
| |
Purge
/ Foreline Port |
205-020 |
| |
Purge
Inlet |
205-012 |
| RGA
PORT |
| |
RGA
CF To CPA Port |
GV-275 |
| TARGET
4" X 10" |
| |
Cathode
/ Insulator (2 ea.) |
205-272 |
| |
Water
Jacket (1 ea.) |
205-268 |
| TARGET
4" X 12" |
| |
Cathode
/ Insulator (2 ea.) |
205-275 |
| |
Water
Jacket (1 ea.) |
205-272 |
| CHAMBER |
| |
Main
Chamber (MC) Top Lid |
205-473 |
| |
Rectangular
Front Window |
205-456 |
| |
End
Station (ES) / Main Chamber (MC) (2 ea.) |
205-381 |
| |
End
Station Door (2 ea.) |
205-461 |
| |
End
Station Door To Window (2 ea.) |
205-385 |
| |
CPA
1" Feed Thru & Blank Off (a/r) |
205-216 |
| |
Roughing
Manifold |
205-223 |
| |
Extension
Chamber / Main Chamber / SE / LL / ES |
205-381 |
| |
Extension
Chamber (EC) (Top Lid) |
205-461 |
| |
Extension
Chamber View Port |
205-245 |
| |
Rotary
Motion Feedthrus |
205-026 |
| |
Octal
Feedthru Header |
5-120 |
| LOAD
LOCK |
| |
Load
Lock Gate |
205-450 |
| |
Bonnet
To Body |
205-380
? |
| |
LL
/ Dutchman / ES |
205-381 |
| |
Actuator
Block To Bonnet |
205-235 |
| |
Access
Cover |
205-235 |
| |
Bellows
To Rack Holder |
205-212 |
| |
Bellows
To Actuator Block |
205-229 |
| |
Piston
To Bellows |
205-218 |
| |
Piston
To Cylinder |
205-435 |
| |
Cylinder
To Piston |
205-337 |
| |
End
Cap To Cylinder |
205-258 |
| SPUTTER
ETCH CATHODE ASSY |
| |
Sputter
Etch Chamber Top & Bottom (2 ea.) |
205-463 |
| |
Ignitor |
205-216 |
| |
Cathode
/ Insulator / Cathode Holder To Bellows (4 ea.) |
205-228 |
| |
Bellows
to Bottom Plate (2 ea.) |
205-231 |
| |
First
Cylinder / Piston / Back Plate To 1st Cylinder (2 ea.) |
205-124 |
| |
Piston
/ First Cylinder |
205-133 |
| |
Back
Plate First Cylinder / First Cylinder |
205-135 |
| |
Second
Cylinder / Second Piston / Second Back Plate (2 ea.) |
205-230 |
| |
Second
Piston / Second Cylinder |
205-236 |
| |
Second
Back Plate / Second Cylinder |
205-237 |
| VARIAN
1/2 VALVE (VENT) |
| |
Main
Seal |
205-224 |
| |
Bellows |
205-116 |
| |
Body |
205-220 |
| |
Bellows,
Square (Inside) |
205-012 |
| VARIAN
1 5/8 VALVE (ROUGH) |
| |
Main
Seal |
205-234 |
| |
Bellows |
205-222 |
| |
Body |
205-334 |
| |
Bellows,
Squate (Inside) |
205-012 |
| |
|
|
| |
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to top |
|
