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Here are our other system
specific O-ring listings: |
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| CHA's Mark
50 System is specifically designed for flexibility and long term reliability
in high production semiconductor metalization environments. |
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The Nordiko
2000, 2550 and 8550 Sputtering Systems offer the highest degree of process
flexibility in the industry.
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Listed
below are the major component O-rings available for the
Perkin-Elmer 4400 Sputtering Systems. |
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| LOAD
LOCK |
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L/L
Gate |
205-385 |
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L/L
Act. F/T, Shaft |
205-314 |
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L/L
Act. F/T, Flange |
205-226 |
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L/L
Door |
205-31.80 |
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L/L
Drive, Shaft |
205-110 |
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L/L
Drive, Flange |
205-224 |
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L/L
Drive, Body |
205-126 |
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L/L
Elevator, Shaft |
205-214 |
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L/L
Elavator, Flange |
205-227 |
| MAIN
CHAMBER |
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Main
Chamber Lid & Bottom |
205-26.7 |
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Throttle
Valve Stem |
205-106 |
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M/C
Drive, Shaft |
205-110 |
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M/C
Drive, Flange |
205-224 |
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M/C
Drive, Body |
205-126 |
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Hivac
Valve Flange |
205-272 |
| TARGET
ASSEMBLY, 8 INCH DC MAG |
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Insulator,
Flange |
205-269 |
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Insulator,
Inner |
205-256 |
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Water
Jacket, Flange |
205-250 |
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Water
Jacket, Inner |
205-256 |
| TARGET
ASSEMBLY, 8 INCH RF |
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Insulator,
Flange |
205-268 |
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Insulator,
Inner |
205-258 |
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Water
Jacket, Flange |
205-252 |
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Water
Jacket, Inner |
205-210 |
| TARGET
ASSEMBLY, DELTA FEEDTHRU |
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Bearing
Housing, Inner |
205-222 |
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Bearing
Housing, Flange |
205-235 |
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Shutter,
Inner |
205-214 |
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Shutter,
Flange |
205-210 |
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Gas
Igniter |
205-210 |
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Top
Plate Blank-Off |
205-210 |
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back
to top |
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