| 10
INCH GATE VALVE |
| |
Head
Gate |
205-454 |
| |
Bonnet
To Body |
205-277 |
| |
Actuator
Block To Bonnet |
205-228 |
| |
Access
Cover |
205-235 |
| |
Bellows
To Actuators Block |
205-209 |
| |
Bellows
To Rack Holder |
205-212 |
| |
Pistons
To Bellows |
205-218 |
| |
Pistons
To Cylinders |
205-435 |
| |
Cylender
To Piston |
205-337 |
| |
End
Cap To Cylinder |
205-258 |
| |
Throttle
Piston To Cylinder |
205-442 |
| |
Shaft
Seal |
205-112 |
| |
TVBC
To I.G. Tube |
205-116 |
| 6
INCH GATE VALVE |
| |
Head
Gate |
205-369 |
| |
Bonnet
To Body |
205-266 |
| |
Actuator
Block To Bonnet |
205-228 |
| |
Access
Cover |
205-226 |
| |
Bellows
To Actuators Block |
205-225 |
| |
Bellows
To Rack Holder |
205-114 |
| |
Piston
To Bellows |
205-218 |
| |
Piston
To Cylinder |
205-239 |
| |
Cylinder
To Piston |
205-141 |
| |
End
Cap To Cylinder |
205-240 |
| |
Throttle
Piston To Cylinder |
205-349 |
| |
Shaft
Seal |
205-112 |
| |
TVBC
To I.G. Tube |
205-116 |
| LOAD
LOCK VALVE |
| |
Load
Lock Gate |
205-457 |
| |
Bonnet
To Body |
205-384 |
| |
Actuator
Block To Bonnet |
205-235 |
| |
Access
Cover |
205-235 |
| |
Bellows
To Rack Holder |
205-212 |
| |
Bellows
To Actuator Block |
205-229 |
| |
Piston
To Bellows |
205-218 |
| |
Piston
To Cylinder |
205-435 |
| |
Cylinder
To Piston |
205-337 |
| |
End
Cap To Cylinder |
205-258 |
| CHAMBER
SEALS |
| |
TVBC
/ Sub Plate / Spool / Main Chamber |
205-266 |
| |
Roughing
Manifold |
205-223 |
| |
CPA
Feedthru (S/E, Gas, Octal, Blank) |
205-216 |
| |
End
/ Load Lock / Ext / Main/ Ext/ Load Lock / End |
205-385 |
| |
Main
Chamber Top |
205-28 |
| |
Octal
Feedthru Header |
205-120 |
| WINDOW
SEALS |
| |
Front
Windows |
205-245 |
| |
Rotary
Motion Feedthrus |
205-026 |
| DOOR
SEALS |
| |
End
Chamber / Door |
205-469 |
| |
Door
/ Window |
205-385 |
| TARGET
KIT SEALS |
| |
Extension
Chamber Top |
205-468 |
| |
Water
Jacket / Cathode |
205-278 |
| |
Cathode
/ Insulator / Top Lid |
205-279 |
| |
Insulator
/ Top Lid, New Style |
205-280 |
| HOIST
ASSY |
| |
Upper
& Lower Plug Cylinder Seal |
205-229 |
| |
Lower
Plug Shaft Seal |
205-222 |
| |
Back-up
Plate Seal |
205-210 |
| |
Top
Plate Seal |
205-243 |
| SPUTTER
ETCH CATHODE ASSY |
| |
Sputter
Etch Chamber Top & Bottom |
205-475 |
| |
Cathode
/ Insulator / Cathode Holder To Bellows (4 ea.) |
205-228 |
| |
Bellows
To Bottom Plate (4 ea.) |
205-232 |
| |
First
Cylinder / Piston / Backplate / First Cylinder (2 ea.) |
205-134 |
| |
Piston
/ First Cylinder |
205-133 |
| |
Back
Plate First Cylinder / First Cylinder |
205-135 |
| |
Second
Cylinder / Second Piston / Second Backplate (2 ea.) |
205-230 |
| |
Second
Piston / Second Cylinder |
205-236 |
| |
Second
Back Plate / Second Cylinder |
205-237 |
| SUBSTRATE
HEATER, OLD STYLE |
| |
Water
Jacket / Mtg. Plate / Feedthru (6 ea.) |
205-216 |
| |
Water
Jacket / Mtg. Plate / Top Lid (2 ea.) |
205-280 |
| VARIAN
1/2 VALVE (VENT) |
| |
Main
Seal |
205-224 |
| |
Bellows |
205-116 |
| |
Body |
205-220 |
| |
Bellows
(Inside) |
205-012 |
| VARIAN
1 5/8 VALVE (ROUGH) |
| |
Main
Seal |
205-234 |
| |
Bellows |
205-222 |
| |
Body |
205-334 |
| |
Bellows
(Inside) |
205-012 |
| CT-10
CRYO KIT |
| |
Top
Flange |
205-278 |
| |
Poppet
Valve / Cryo |
205-116 |
| |
Poppet
Valve / Seat |
205-213 |
| |
Purge
/ Foreline Port |
205-020 |
| |
Purge
Inlet |
205-012 |
| CT-8
CRYO KIT |
| |
Top
Flange |
205-172 |
| |
Poppet
Valve / Cryo |
205-116 |
| |
Poppet
Valve / Seat |
205-213 |
| |
Purge
/ Foreline Port |
205-020 |
| |
Purge
Inlet |
205-012 |
| RGA
PORT |
| |
RGA
CF To CPA Port |
GV-275 |
| |
|
|
| |
back
to top |
|
