9900 Main
Features
Process
Sputtering
Options
Specifications

PC/PLC Controller


The control system in the 9900 series is designed for process versatility and ease of operation. The system is available with a fully automatic control systems using a PC/PLC Design. The fully automatic system is completely programmable and makes the 9900 a menu-driven system. By following the computer prompts, information such as the process gas flow, the track speed and the deposition rate/target can be pre-programmed.

Versatile

Both deposition chamber shields are easily accessible. Inline substrate heat is obtained with argon-filled quartz lamps in a reflective enclosure. The inline heaters are variable between ambient and 350°C. In the 9900, substrates are heated from the top side only and in the 9930/9940, both sides of the substrate are heated simultaneously because heaters are located on both sides of the pallet.
9900 Pallet Indexing Assembly.
High Vacuum Pumping

The 9900 Series can be variously configured as required with diffusion or cryo high vacuum pumping. The system can be equipped with single or multiple pumps. Separate pumps for each or both end chambers or a single pump for the entire machine can be provided.

CPA Shielding

Deposition chamber shielding is made of stainless steel or aluminum and are easily accessed & removed for periodic cleaning.
The transport chain speed is variable from 0.1 to 80 cm/minute in 0.1 increments. Using a Stepper Motor and Controller unit.

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