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Equipment Safety
The 9900
is completely interlocked for maximum personnel and
equipment safety. All access panels, sputtering doors,
chamber pressure switches, and water flow switches are
interlocked to provide protection for personnel, the system
and the wafer load in process. |
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Typical 9900
(5) Target Sputtering System. |
Load
Lock
Up to 28 pallets can be loaded from either end of the
system. Once the pallets are loaded into an end chamber and
the load lock chamber has been evacuated to the preset
pressure, the load lock valves open to the process chambers
and the system is pumped down to a preset pressure before
deposition. |
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CPA builds the
most reliable systems in the industry! In actual on-line
production use over the last seven years in some of the most
active and successful fabrication facilities in the world, CPA's
9900 Series operated at better than 90% up-time, including
normal shutdown for target replacement, chamber cleaning and
pump service. |
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