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CPA builds the most reliable
systems in the industry! In actual on-line production use over the last twelve
years in some of the most active and successful fabrication facilities in the
world |
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pallet End chamber and pallets loader/unloaders are also optionally
available. |
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Features
The 9900
System represents the most versatile series of standard
Sputtering Systems available. Practically any arrangement of
standard components can be assembled to provide an almost
limitless set of system configurations. Typical variations
include the number of targets, the number and type of
pumping system (diffusion or cryopumped high vacuum system),
the number and type of power supplies (RF, or DC), with or
without load lock, with or without sputter etching, with or
without substrate heating, to mention some of the possible
standard variations. |
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Versatility
goes beyond process configurations. CPA builds systems with
programmable process controllers or 4 button semiautomatic
controllers.
(shown on
left) 9900 standard Cleanroom Calibration procedure in process. |
Cathode
Assemblies
Cathode assemblies are 14-7/8" by 4-3/4" and include a water
cooled copper backing plate. There are no water-to-vacuum
seals. The same cathode assembly is used for DC Magnetron,
RF Magnetron, or diode sputtering. The cathode mounts
through the top plate (or bottom plate for sputter up
systems). |
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Single Sided
Sputtering
As shown on the
left, Single Sided Sputtering is the process which defines the
9900, you can see from this sample sketch the Sputter etch
concept of the 9900. |
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