Up to 28
pallets can be loaded at either end of a 9895 Series System.
Once pallets are loaded and the load-lock chamber is
evacuated, load-lock valves are opened and the system is
pumped down to a preset process vacuum. Pallets are
automatically lowered onto the transfer mechanism and moved
through the process chambers. The 9895 transport is
bi-directional so pallets can be transported back and forth
for sequential or multiple-pass deposition.
CPA builds the most reliable
systems in the industry! In actual on-line production use over the last twelve
years in some of the most active and successful fabrication facilities in the
Practically any arrangement of
standard components can be assembled to provide an almost
limitless set of system configurations. Typical variations
include the number of targets, the number and type of pumping
system (diffusion or cryopumped high vacuum system), the
number and type of power supplies (RF, or DC), with or
without load lock, with or without sputter etching, with or
without substrate heating, to mention some of the possible
Versatility goes beyond process
configurations. CPA builds systems with programmable process
controllers or 4 button semiautomatic controllers.