Up to 28 pallets can be loaded at either end of a 9895 Series System. Once pallets are loaded and the load-lock chamber is evacuated, load-lock valves are opened and the system is pumped down to a preset process vacuum. Pallets are automatically lowered onto the transfer mechanism and moved through the process chambers. The 9895 transport is bi-directional so pallets can be transported back and forth for sequential or multiple-pass deposition.

CPA builds the most reliable systems in the industry! In actual on-line production use over the last twelve years in some of the most active and successful fabrication facilities in the world

Practically any arrangement of standard components can be assembled to provide an almost limitless set of system configurations. Typical variations include the number of targets, the number and type of pumping system (diffusion or cryopumped high vacuum system), the number and type of power supplies (RF, or DC), with or without load lock, with or without sputter etching, with or without substrate heating, to mention some of the possible standard variations.

Versatility goes beyond process configurations. CPA builds systems with programmable process controllers or 4 button semiautomatic controllers.