Perkin Elmer 4450

Systems

Perkin Elmer 2400

XM 90 / 2000

Varian 3000 Series

CPA H3000

CPA H2000

CPA 9900

CPA 9895

MK 40 / 50

1000

The Perkin Elmer 4400 is the best of both worlds. It combines the 2400 and 2400-8L. So you get a rotating platten with multiple substrates and can sputter up to 8" wafers. Also comes with a load lock that keeps the targets under vacuum while substrates are being loaded. This is truly the best option for many industries.

The CPA H3000 is a great inline system that can give you multiple options just like the other CPA machines. It also has a modular foot print which means it can grow to accomodate more targets. This can sputter a 30" wide substrate. Typically a single pallet machine but the pallet can be any length.

The Perkin Elmer 2400 is a great machine for research and development. This machine is simple but still comes with many options. Can include DC, RF, Heat, and Preclean. There is no load lock but pumpdown times are fairly quick because ofthe small chamber size. Can handle up to 8 inch substrates on a rotating table.

The Varian XM 2000 is a complete PLC upgrade from the XM 90 that has been tried and true for many years. It is a cassette to cassette machine that comes with 2 or 4 stations. Substrate size is 4 - 6 inch. This is one of the most versaltile sputtering systems available today. An excellent tool for sputtering.

The Varian 3180, 3190, 3280, and 3290 are true work horses in the industry. All 3000 series machines offer great performance and reliability. It is a cassette to cassette machine that can handle 4" - 6" wafers.

The CPA H2000 is a great inline system that can give you multiple options just like the other CPA machines. It also has a modular foot print which means it can grow to accomodate more targets. This can sputter a 20" wide substrate. Typically a single pallet machine but the pallet can be any length.

The CPA 9900 is a great inline system that can give you a multiple options just like the 9895. It has a modular foot print which means it can grow to accomodate more targets. Good uniformity on 12 inch substrates. Comes with indexers to hold multiple pallets and transfers the wafers on a conveyor.

The CPA 9895 is a great inline system that can give you a multiple options such as RF, DC, and etc. . It has a smaller foot print then its other modules and can get substrates up to 10 inches. Comes with indexers to hold multiple pallets and transfers the wafers on a conveyor.

The MK 50 is designed for flexibility and long term reliability in high production semiconductor metalization. The MK 50 can accomodate a wide variety of depostion equipment including source shutters, heaters, and Ion sources. This machine has many options which gives it great flexiblity to suit any fabs needs. The MK-40 is just a smaller version with all the same options.

The Belljar 1000 is a great starter for an evaporator system. This tool can accomodate any source as well as heat and an ion source. If you want a small footprint but all the benefits you need to look at the 1000 series.