Perkin Elmer 4450

Systems

Perkin Elmer 2400

XM 90 / 2000

Varian 3000 Series

CPA H3000

CPA H2000

CPA 9900

CPA 9895

MK 40 / 50

1000

The Perkin Elmer 4400 delivers the best of both worlds by combining the features of the 2400 and 2400-8L. It offers a rotating platen that handles multiple substrates and sputters wafers up to 8". A load lock keeps the targets under vacuum while you load substrates, ensuring efficiency and protection. For many industries, it stands out as the top choice.

The CPA H3000 is a high-performance inline system that delivers the flexibility of other CPA machines. Its modular footprint allows you to expand and accommodate additional targets. It can sputter substrates up to 30" wide and, while typically configured as a single-pallet machine, the pallet can be any length.

The Perkin Elmer 2400 excels in research and development, offering a simple yet versatile platform. It supports options like DC, RF, Heat, and Preclean. While it doesn’t include a load lock, the small chamber size ensures quick pumpdown times. A rotating table handles substrates up to 8 inches with ease.

The Varian XM 2000 builds on the proven XM 90 with a complete PLC upgrade. This cassette-to-cassette system comes with 2 or 4 stations and handles substrates from 4 to 6 inches. Its versatility makes it one of today’s most capable sputtering systems—an excellent tool for precise, reliable deposition.

The Varian 3180, 3190, 3280, and 3290 are true workhorses in the industry. All 3000-series machines deliver outstanding performance and reliability. These cassette-to-cassette systems handle wafers from 4" to 6" with ease.

The CPA H2000 is a versatile inline system that delivers the same flexibility as other CPA machines. Its modular footprint lets you expand to accommodate additional targets. It can sputter substrates up to 20" wide and, while typically configured as a single-pallet machine, the pallet can be any length.

The CPA 9900 is a high-performance inline system that offers the same flexibility as the 9895. Its modular footprint lets you expand to accommodate additional targets. It delivers excellent uniformity on 12" substrates and includes indexers to hold multiple pallets, transferring wafers efficiently via a conveyor.

The CPA 9895 is a versatile inline system offering multiple options, including RF and DC. Its compact footprint supports substrates up to 10 inches. The system includes indexers to hold multiple pallets and efficiently transfers wafers via a conveyor.

The MK 50 delivers flexibility and long-term reliability for high-production semiconductor metallization. It accommodates a wide range of deposition equipment, including source shutters, heaters, and ion sources. With numerous options, the MK 50 adapts to meet any fab’s needs. The MK 40 offers the same capabilities in a smaller footprint.

The Belljar 1000 is an ideal starter for an evaporator system. It accommodates any source, plus heat and an ion source. For a compact footprint without sacrificing capability, the 1000 series delivers all the benefits you need.