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The Varian XM 2000 is a complete PLC upgrade from the XM 90 that has been tried and true for many years. It is a cassette to cassette machine that comes with 2 or 4 stations. Substrate size is 4 - 6 inch. This is one of the most versaltile sputtering systems available today. An excellent tool for sputtering. |
 | The Varian 3190 is a true work horse in the industry. It is a cassette to cassette machine that can handle up to 5 inch wafers. |
 | The Varian 3290 is also a true work horse in the industry. It is based off the 3190 but gives significant improvements for greater performance and reliability. |