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The CPA 9895 is a great inline system that can give you a multiple options such as RF, DC, and etc. . It has a smaller foot print then its other modules and can get substrates up to 10 inches. Comes with indexers to hold multiple pallets and transfers the wafers on a conveyor. |
| The CPA 9900 is a great inline system that can give you a multiple options just like the 9895. It has a modular foot print which means it can grow to accomodate more targets. Good uniformity on 12 inch substrates. Comes with indexers to hold multiple pallets and transfers the wafers on a conveyor. |
| The CPA H3000 is a great inline system that can give you a multiple options just like the other CPA machines. It also has a modular foot print which means it can grow to accomodate more targets. This can sputter a 30 inch substrate. Typically a single pallet machine but the pallet can be any length. |