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The CHA 1000 is a great start for an evaporator system. This tool can accomodate any source as well as heat and an ion source. If you want a small footprint but all the benefits you need to look at the CHA 1000. |
 | The CHA MK 40 which is your smaller version of the MK 50. It still has all the benefits of its bigger brother but just on a smaller foot print. Still a great tool for any production facility. |
 | The CHA MK 50 is designed for flexibility and long term reliability in high production semiconductor metalization. The MK 50 can accomodate a wide variety of depostion equipment including source shutters, heaters, and Ion sources. This machine has many options which gives it great flexiblity to suit any fabs needs. |